5F043 ウェットエッチング技術 Patent Trends
The Theme Code "ウェットエッチング技術" had 144 patent application filings in the publication-lag-adjusted comparison period (2024-01-01 to 2024-10-31). This is a significantly decreased of -49 filings (-25.4%) over 193 they had in the same period of the previous year (2023-01-01 to 2023-10-31).
The highest number of filings in 2022 with 237 cases, and their lowest number in 2024 with 165 cases (years covered: 2021, 2022, 2023, 2024).
The mean of the number of filings over the last 4 years (2021 to 2024, 856 cases in total) is 214, and the median is 227. The coefficient of variation (standard deviation/mean) is 0.14, and filings have been moderate fluctuations.
| Index | Value |
|---|---|
| Average | 214 patents |
| Std Dev | 29.0 |
| COV | 0.14 |
| Year | Cases | YOY |
|---|---|---|
| 2025 year | 95 cases | -42.4% |
| 2024 year | 165 cases | -25.00% |
| 2023 year | 220 cases | -7.17% |
This report provides the latest patent analysis information (the IP landscape, including a patent map) on the patent search results of the JP patent database for ウェットエッチング技術[5F043] for the period of the last 6 years (2020 to 2025). You can compare the information in this report with the trends in your competitors’ patent filings and technologies.
This service provides, free of charge, a patent analysis report based on the latest patent data (Japanese, U.S., European, and PCT application publications) for use in patent searches, patent analysis, and IP landscaping. The service is offered by "Patent Integration" a firm specializing in patent search/patent analysis.
This report includes basic information to help you understand the IP strategy and management of ウェットエッチング技術, such as changes in the number of patents/patent applications they have filed, comparisons of the numbers of patents/patent applications filed by their peers and competitors, and their top coapplicants (joint research partners, alliance partners). It can be used in various intellectual property business operations such as IP landscaping, patent search/patent analysis, preparation of intellectual property business evaluation reports, selection of M&A candidates, and selection of alliance partners.
He is a patent attorney at a patent office. He specializes in invention counseling, patent filing, and intellectual property strategies for start-up companies and new businesses in the fields of software, information technology and artificial intelligence. He runs a patent course for beginners on Udemy, an online course provider.
After studying physics at the University of Tokyo as a doctoral student, he was engaged in intellectual property analysis and technology trend research as an in-house patent attorney at a precision equipment manufacturer and at Toyota Central R&D Labs. Inc..
Introduction
The concept of the "IP landscape" (IPL) has been attracting attention recently.
An IP landscape is not limited to patent information, but also integrates and analyzes business information (e.g., non-patent information such as papers, news releases, stock information, and market information). Intellectual-property-based business management is realized through the analysis of intellectual property information applied to the formulation of management strategies and business strategies. This is a comprehensive approach that includes but not limited to planning of open and closed strategies, selecting M&A candidates, searching for alliance partners, and formulating intellectual property strategies, through the exploitation of intellectual property information.
IP landscaping usually includes patent search and patent analysis. In patent search and patent analysis, it is important to grasp the market position of each company and the overall technological trends and development trends for each technology. More specifically, it is important to understand what intellectual property your own company and other companies hold, what the strengths and weaknesses of other companies are, and how other companies are trying to exploit their intellectual property. In other words, it is important to understand both the business strategy and the intellectual property strategy of each company.
ウェットエッチング技術, Changes in the Number of JP Patents/Patent Applications
The changes in the number of patent filings of ウェットエッチング技術 over the last 6 years (JP) are shown below.
The change in the number of patents/patent applications is the most basic index in patent analysis. By examining the change in the number of patents/patent applications, you can see the status of technological development and R&D focus for each company or technology. It should be noted that since there is a one and a half year lag between the filing and the laying open of patent applications, it is not possible to analyze the situation more recently than one and half years prior to the present.
ウェットエッチング技術 JP patent filing trend (unit: cases)
| Year | Cases |
|---|---|
| 2021 | 234 |
| 2022 | 237 |
| 2023 | 220 |
| 2024 | 165 |
| 2025 | 95 |
Patent Landscape
Patent landscaping is a visualization of the distribution of patent filings (application focus areas) for each technical keyword. Mountains and islands indicated by heatmap contours represent clusters of patent applications filed, and red areas on the heatmap indicate many patent filings relating to the keyword.
The patent landscape for ウェットエッチング技術 gives an intuitive understanding of what patent filings they have made and what technical position is to be established. By selecting filing year checkboxes and filtering, you can track their past filing trends (what technical area they have focused on).
By selecting applicant/patent holder checkboxes and filtering, you can visually grasp the technical areas of the filings for each applicant and the partnerships or alliances formed. Please use it as a guide for patent analysis and IP landscaping.
Keywords (importance)
Top keywords frequently used in patent filings for ウェットエッチング技術 are shown below.
Top keywords for ウェットエッチング技術
| Keyword | Score |
|---|---|
| 基板 | 100.0 |
| エッチング | 56.62 |
| 表面 | 52.83 |
| 供給 | 39.88 |
| 膜 | 27.21 |
| 半導体 | 26.08 |
| 酸 | 21.91 |
| 酸化 | 20.95 |
| 位置 | 17.64 |
| 金属 | 16.9 |
| 回転 | 16.72 |
| ノズル | 15.96 |
| 除去 | 15.2 |
| 方向 | 14.58 |
| シリコン | 14.54 |
Search Set (Analysis Patents)
This patent analysis report was created for a patent search set of 951 cases retrieved by applying the following search formula and analysis period to the following patent database. Patent information such as a patent analysis result, a patent map, and a patent landscape can be freely used for patent searches, analysis, and work on intellectual property strategies, including IP landscaping.
ウェットエッチング技術[5F043]
Recent publications
| Publication No. | Title | Bibliographic info | Theme |
|---|---|---|---|
| 1. JPA2026-163465 | 半導体ウェハのエッチング方法 | ・Applicant 日清紡マイクロデバイス株式会社 ・Filing date 2025-03-28 ・Publication date 2026-10-09 | 4K057, 5F043 |
| 2. JPA2026-164109 | シリコン酸化膜のエッチング液およびそれを用いたエッチング方法 | ・Applicant 株式会社トクヤマ ・Filing date 2025-03-28 ・Publication date 2026-10-09 | 5F043 |
| 3. JPA2026-164150 | 基板処理方法及び基板処理システム | ・Applicant 東京エレクトロン株式会社 ・Filing date 2025-03-28 ・Publication date 2026-10-09 | 5F043 |
| 4. JPA2026-164877 | 処理液、半導体基板の処理方法、及び半導体デバイスの製造方法 | ・Applicant 東京応化工業株式会社 ・Filing date 2026-03-06 ・Publication date 2026-10-09 | 4H003, 5F043, 5F157 |
| 5. JPA-HYO2026-533791 | 表面アルキル化を使用した酸化ケイ素に対して窒化ケイ素を選択的にエッチングする方法 | ・Applicant トーキョーエレクトロンユーエスホールディングスインコーポレーテッド, 東京エレクトロン株式会社 ・Filing date 2024-06-21 ・Publication date 2026-10-09 | 5F004, 5F043 |
| 6. JPA-HYO2026-533790 | モリブデンの湿式原子層エッチングの方法 | ・Applicant トーキョーエレクトロンユーエスホールディングスインコーポレーテッド, 東京エレクトロン株式会社 ・Filing date 2024-07-03 ・Publication date 2026-10-09 | 5F043 |
| 7. JPA2026-158167 | 感光性樹脂組成物、感光性エレメント、硬化物、デバイス、樹脂パターンの形成方法及び回路基板の製造方法 | ・Applicant 株式会社レゾナック ・Filing date 2025-03-24 ・Publication date 2026-10-07 | 2H196, 2H225, 4F100, 5F043, 5F103 |
| 8. JPA2026-158817 | 冷却装置、基板処理装置および処理液の冷却方法 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F157 |
| 9. JPA2026-158814 | 冷却装置、基板処理装置および冷却方法 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 3L103, 5F043, 5F157 |
| 10. JPA2026-158818 | 冷却装置、基板処理装置および処理液の冷却方法 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F157 |
| 11. JPA2026-159519 | エッチング液、及びエッチング方法 | ・Applicant 東京応化工業株式会社 ・Filing date 2026-01-14 ・Publication date 2026-10-07 | 5F043 |
| 12. JPA2026-158815 | 基板処理装置 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F157 |
| 13. JPA2026-158819 | 冷却装置、基板処理装置および処理液の冷却方法 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F157 |
| 14. JPA2026-159001 | 半導体チップ及び解析用半導体チップの加工方法 | ・Applicant 東芝情報システム株式会社 ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F110 |
| 15. JPA2026-158816 | 冷却装置、基板処理装置および処理液の冷却方法 | ・Applicant 株式会社SCREENホールディングス ・Filing date 2025-03-25 ・Publication date 2026-10-07 | 5F043, 5F157 |
Same industry / competition company information (JP)
{'ja': '技術テーマ「ウェットエッチング技術」における上位出願人の特許情報を以下に示します。各企業の特許件数を比較することで、過去および現在の各社の技術テーマにおける研究開発状況や、技術テーマにおける各社の位置付けを確認できます。なお、特許は出願から公開までに一年半のタイムラグがあるため、一年半より直近の状況については分析できない点に注意する必要があります。', 'en': "The patent information of the higher applicant in the technical theme ウェットエッチング技術 is shown below. By comparing the number of patents of each company, you can check the research and development status of each company's past and present technical themes and the position of each company in the technical theme. Patents have a time lag of about 18 months from filing to publication."}
Trends in filing of joint patent applications in the last 3 years (2023 to 2025).
Comparing the number of applications of each company, 株式会社SCREENホールディングス has the highest number of joint applications in the last in the last 3 years (2023 to 2025) with 148 cases, followed by 東京エレクトロン株式会社 with 72 cases.
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 148 cases |
| 東京エレクトロン株式会社 | 72 cases |
| 東京応化工業株式会社 | 21 cases |
| 株式会社トクヤマ | 20 cases |
| 芝浦メカトロニクス株式会社 | 19 cases |
| キオクシア株式会社 | 16 cases |
Trends in filing of joint patent applications for the target period (2020 to 2025).
Comparing the number of applications of each company, 株式会社SCREENホールディングス has the highest number of joint applications in the last for the target period (2020 to 2025) with 333 cases, followed by 東京エレクトロン株式会社 with 204 cases.
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 333 cases |
| 東京エレクトロン株式会社 | 204 cases |
| 株式会社トクヤマ | 46 cases |
| キオクシア株式会社 | 41 cases |
| 芝浦メカトロニクス株式会社 | 37 cases |
| 東京応化工業株式会社 | 36 cases |
Same industry / competition company JP patent filing ranking
佐藤総合特許事務所 代表弁理士
佐藤 寿のコメント
競合企業の長期推移をどう読むか
同業や競合企業の長期的な特許出願件数の推移から、長期トレンドと出願件数の山や谷を確認することができます。
解説の続きを読む
Same industry / competition company, Change in the Number of JP Patents
Below is a patent map showing changes in the number of applications for JP patents of 6 companies in the same industry over the past 6 years.
Competitor filing ranking
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 333 |
| 東京エレクトロン株式会社 | 204 |
| 株式会社トクヤマ | 46 |
| キオクシア株式会社 | 41 |
| 東京応化工業株式会社 | 36 |
| 芝浦メカトロニクス株式会社 | 37 |
Top company information (JP)
{'ja': '技術テーマ「ウェットエッチング技術」における上位出願人の特許情報を以下に示します。各企業の特許件数を比較することで、過去および現在の各社の技術テーマにおける研究開発状況や、技術テーマにおける各社の位置付けを確認できます。なお、特許は出願から公開までに一年半のタイムラグがあるため、一年半より直近の状況については分析できない点に注意する必要があります。', 'en': "The patent information of the higher applicant in the technical theme ウェットエッチング技術 is shown below. By comparing the number of patents of each company, you can check the research and development status of each company's past and present technical themes and the position of each company in the technical theme. Patents have a time lag of about 18 months from filing to publication."}
佐藤総合特許事務所 代表弁理士
佐藤 寿のコメント
競合企業との比較のポイント
同業や競合企業が特許に注力している分野を知ることで、自社の戦略や製品開発の方向性を把握することができます。
解説の続きを読む
Trends in filing of joint patent applications in the last 3 years (2023 to 2025).
among the top coapplicants, 株式会社SCREENホールディングス has the highest number of joint applications in the last in the last 3 years (2023 to 2025) with 148 cases, followed by 東京エレクトロン株式会社 with 72 cases.
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 148 cases |
| 東京エレクトロン株式会社 | 72 cases |
| 東京応化工業株式会社 | 21 cases |
Trends in filing of joint patent applications for the target period (2020 to 2025).
among the top coapplicants, 株式会社SCREENホールディングス has the highest number of joint applications in the last for the target period (2020 to 2025) with 333 cases, followed by 東京エレクトロン株式会社 with 204 cases.
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 333 cases |
| 東京エレクトロン株式会社 | 204 cases |
| 東京応化工業株式会社 | 36 cases |
Top company JP patent filing ranking
Below is a ranking of the number of JP patent applications by ウェットエッチング技術’s top 3 coapplicants over the last 6 years.
佐藤総合特許事務所 代表弁理士
佐藤 寿のコメント
競合企業の長期推移をどう読むか
同業や競合企業の長期的な特許出願件数の推移から、長期トレンドと出願件数の山や谷を確認することができます。
解説の続きを読む
Top co-applicant filing ranking
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 333 |
| 東京エレクトロン株式会社 | 204 |
| 株式会社トクヤマ | 46 |
Top company, Change in the Number of JP Patents
Below is a patent map showing the changes in the numbers of JP patent filings by ウェットエッチング技術’s top 3 coapplicants over the last 6 years.
Top co-applicant filing ranking
| Name | Cases |
|---|---|
| 株式会社SCREENホールディングス | 333 |
| 東京エレクトロン株式会社 | 204 |
| 株式会社トクヤマ | 46 |
Top company details
Trends in filing of joint patent applications with 株式会社SCREENホールディングス
ウェットエッチング技術 filed 333 joint applications with 株式会社SCREENホールディングス for the analysis period (2020 to 2025).
The mean of the number of filings over the last 5 years (2020 to 2024, 299 cases in total) is 59.8, and the median is 60.0. The coefficient of variation (standard deviation/mean) is 0.09, and filings have been stable.
The highest number of filings in 2022 with 70 cases, and their lowest number in 2024 with 54 cases (years covered: 2020, 2021, 2022, 2023, 2024).
| Index | Value |
|---|---|
| Average | 59.8 patents |
| Std Dev | 5.7 |
| COV | 0.09 |
| Year | Cases | YOY |
|---|---|---|
| 2025 year | 34 cases | -37.0% |
| 2024 year | 54 cases | -10.00% |
| 2023 year | 60 cases | -14.29% |
Trends in filing of joint patent applications with 東京エレクトロン株式会社
ウェットエッチング技術 filed 204 joint applications with 東京エレクトロン株式会社 for the analysis period (2020 to 2025).
The mean of the number of filings over the last 5 years (2020 to 2024, 197 cases in total) is 39.4, and the median is 40.0. The coefficient of variation (standard deviation/mean) is 0.23, and filings have been moderate fluctuations.
The highest number of filings in 2022 with 52 cases, and their lowest number in 2024 with 25 cases (years covered: 2020, 2021, 2022, 2023, 2024).
| Index | Value |
|---|---|
| Average | 39.4 patents |
| Std Dev | 9.1 |
| COV | 0.23 |
| Year | Cases | YOY |
|---|---|---|
| 2025 year | 7 cases | -72.0% |
| 2024 year | 25 cases | -37.5% |
| 2023 year | 40 cases | -23.08% |
Trends in filing of joint patent applications with 東京応化工業株式会社
ウェットエッチング技術 filed 36 joint applications with 東京応化工業株式会社 for the analysis period (2020 to 2025).
The mean of the number of filings over the last 5 years (2020 to 2024, 28 cases in total) is 5.6, and the median is 7.0. The coefficient of variation (standard deviation/mean) is 0.6, and filings have been large fluctuations.
The highest number of filings in 2023 with 10 cases, and their lowest number in 2022 with 0 cases (years covered: 2020, 2021, 2022, 2023, 2024).
| Index | Value |
|---|---|
| Average | 5.6 patents |
| Std Dev | 3.6 |
| COV | 0.6 |
| Year | Cases | YOY |
|---|---|---|
| 2025 year | 8 cases | +167% |
| 2024 year | 3 cases | -70.0% |
| 2023 year | 10 cases | - |
Providing patent information to the media (newspapers, magazines, etc.)
"Patent Integration Report" is a web service provided by "Patent Integration Co., Ltd." operated by patent attorneys who are experts in intellectual property rights. Based on the latest patent data, this is one of the largest patent report services in Japan that provides information on technology trends in various companies and technology fields.
The purpose of this web service is to make intellectual property information familiar to many people, regardless of whether they have an interest in intellectual property rights, and to make use of it.
We actively provide various types of patent information that can be used in various media articles such as newspapers, magazines, and web media. Please feel free to contact us from "Inquiry form for details on the content of patent information that can be provided, conditions for provision, etc. Please contact us.
About this Site
All rights related to the data, documents and charts belong to "an integrated patent search/analysis service provider, Patent Integration". Please specify the source “Patent Integration Report, URL: https://patent-i.com/report/en/" when inserting them into in-house materials, external report materials, etc., regardless of whether they are paid or free of charge.
Patent data is obtained by aggregating and analyzing the latest patent data issued by the Patent Offices of respective countries and jurisdictions and by WIPO. Although we take great care in publishing and analyzing the results, we do not guarantee the correctness of the data. We appreciate your understanding.
If you have any concerns about this service, please feel free to contact us.
Credit notation
・MeCab user dictionary for science technology term © National Bioscience Database Center licensed under CC Attribution-Share Alike 4.0 International
Our Commitment to Safety and Security
Patent Integration Co., Ltd. is committed to providing high-quality patent information based on the latest patent data on more than 45 million cases collected from the Patent Offices in Japan, the U.S., Europe, and Taiwan and from PCT publication. 
Patent Integration Co., Ltd. collects the patent data from the Patent Offices in Japan, the U.S., Europe, and Taiwan and from PCT publications to provide it widely in the form of reports so that anyone can check patent information and patent trends with confidence. 
Patent Integration Co., Ltd. is committed to various efforts to enhance the reliability of the information and to allow users to search patent information with confidence.
佐藤総合特許事務所 代表弁理士
佐藤 寿のコメント
競合企業との比較のポイント
同業や競合企業が特許に注力している分野を知ることで、自社の戦略や製品開発の方向性を把握することができます。
解説の続きを読む