ウエハ等の容器,移送,固着,位置決め等技術 (JP Patent Analysis Report)
The Theme Code "ウエハ等の容器,移送,固着,位置決め等技術" had 296 patent application filings in the most recent period (2023-01-01 to 2023-03-31). This is a with an decreasing trend transition of -38 filings (-11.4%) over 334 they had in the same period of the previous year (2022-01-01 to 2022-03-31).
The highest number of filings in 2018 with 1,640 cases, and their lowest number in 2022 with 1,227 cases.
The mean of the number of filings over the last 5 years (2018 to 2023, 7,812 cases in total) is 1,302, and the median is 1,368. The coefficient of variation (standard deviation/mean) is 0.27, and there have been small fluctuations in the number of filings from year to year.
| Index | Value |
|---|---|
| Average | 1,302 patents |
| Std Dev | 350 |
| COV | 0.27 |
| Year | Cases | YOY |
|---|---|---|
| 2022 year | 1,227 cases | -6.97 % |
| 2021 year | 1,319 cases | -6.92 % |
| 2020 year | 1,417 cases | -12.37 % |
This report provides the latest patent analysis information (the IP landscape, including a patent map) on the patent search results of the JP patent database for ウエハ等の容器,移送,固着,位置決め等技術[5F131] for the period of the last 10 years (2014-01-01 to 2024-11-30). You can compare the information in this report with the trends in your competitors’ patent filings and technologies, and use it to search for important patents.
This service provides, free of charge, a patent analysis report based on the latest patent data (Japanese, U.S., European, and PCT application publications) for use in patent searches, patent analysis, and IP landscaping. The service is offered by "Patent Integration" a firm specializing in patent search/patent analysis.
This report includes basic information to help you understand the IP strategy and management of ウエハ等の容器,移送,固着,位置決め等技術, such as changes in the number of patents/patent applications they have filed, comparisons of the numbers of patents/patent applications filed by their peers and competitors, their top coapplicants (joint research partners, alliance partners), and their most important patents. It can be used in various intellectual property business operations such as IP landscaping, patent search/patent analysis, preparation of intellectual property business evaluation reports, selection of M&A candidates, and selection of alliance partners.
- Table of Contents
- Foreign Patent Analysis Report
- Patent Filing Summary for ウエハ等の容器,移送,固着,位置決め等技術
- Search Set (Search Formula/Analysis Patents)
- Related Patent Analysis Report
- Competitors Information
- Top company Information
- • Information on Important Patents
- Provision of patent information to the media
- About this Site
He is a patent attorney at a patent office. He specializes in invention counseling, patent filing, and intellectual property strategies for start-up companies and new businesses in the fields of software, information technology and artificial intelligence. He runs a patent course for beginners on Udemy, an online course provider.
After studying physics at the University of Tokyo as a doctoral student, he was engaged in intellectual property analysis and technology trend research as an in-house patent attorney at a precision equipment manufacturer and at Toyota Central R&D Labs. Inc..
Introduction
The concept of the "IP landscape" (IPL) has been attracting attention recently.
An IP landscape is not limited to patent information, but also integrates and analyzes business information (e.g., non-patent information such as papers, news releases, stock information, and market information). Intellectual-property-based business management is realized through the analysis of intellectual property information applied to the formulation of management strategies and business strategies. This is a comprehensive approach that includes but not limited to planning of open and closed strategies, selecting M&A candidates, searching for alliance partners, and formulating intellectual property strategies, through the exploitation of intellectual property information.
IP landscaping usually includes patent search and patent analysis. In patent search and patent analysis, it is important to grasp the market position of each company and the overall technological trends and development trends for each technology. More specifically, it is important to understand what intellectual property your own company and other companies hold, what the strengths and weaknesses of other companies are, and how other companies are trying to exploit their intellectual property. In other words, it is important to understand both the business strategy and the intellectual property strategy of each company.
After reading this search report, you may be interested in more detailed patent searches and patent analysis. We offer a service called Patent Integration, which is an integrated patent search and patent analysis service. With reasonable pricing and a simple user interface such that even beginners can quickly search for and analyze patent information by company or technology from a web browser, please consider using it for detailed patent searches, patent analysis, and IP landscaping.
Patent Integration has a patent-landscaping function that can visually represent a set of tens of thousands of patents/patent applications. This allows you to convincingly show the technical positions of your company and its competitors to your management and business strategists in order to formulate management strategies and business strategies.
ウエハ等の容器,移送,固着,位置決め等技術, Changes in the Number of JP Patents/Patent Applications
The changes in the number of patent filings of ウエハ等の容器,移送,固着,位置決め等技術 over the last 20 years (JP) are shown below.
The change in the number of patents/patent applications is the most basic index in patent analysis. By examining the change in the number of patents/patent applications, you can see the status of technological development and R&D focus for each company or technology. It should be noted that since there is a one and a half year lag between the filing and the laying open of patent applications, it is not possible to analyze the situation more recently than one and half years prior to the present.
In this report, you can only see the change in the number of patents/patent applications by company or technology, whereas Patent Integration allows you to quickly compare the number of patent applications with your competitors in each technical field by cross-referencing with other keywords and patent classifications.
Patent Landscape ({{ld.d.db_name | country_map: 'en'}})
Patent landscaping is a visualization of the distribution of patent filings (application focus areas) for each technical keyword. Mountains and islands indicated by heatmap contours represent clusters of patent applications filed, and red areas on the heatmap indicate many patent filings relating to the keyword.
The patent landscape for ウエハ等の容器,移送,固着,位置決め等技術 gives an intuitive understanding of what patent filings they have made and what technical position is to be established. By selecting filing year checkboxes and filtering, you can track their past filing trends (what technical area they have focused on).
By selecting applicant/patent holder checkboxes and filtering, you can visually grasp the technical areas of the filings for each applicant and the partnerships or alliances formed. Please use it as a guide for patent analysis and IP landscaping.
In addition, by visually representing the patent data in this manner, you can convincingly show the technical positions of your company and its competitors to your management and business strategists in order to formulate management strategies and business strategies.
In Patent Integration, you can check the specifics of a patent filing by clicking anywhere on the patent landscape screen. You can also quickly check the position of each applicant for each technical field by cross-referencing with other keywords and patent classifications. You can use it as a guide when considering hypotheses about each company's IP strategy on the IP Landscape. You can also use it for higher-grade intellectual property activities. It has reasonable pricing and a simple user interface that is easy for beginners to handle.
Characteristic Terms (Importance)
The following is a list of words (characteristic terms) often used in ウエハ等の容器,移送,固着,位置決め等技術 patent applications. Characteristic terms with a higher importance are used in more patents/patent applications.
Search Set (Analysis Patents)
This patent analysis report was created for a patent search set of 13,437 cases retrieved by applying the following search formula and analysis period to the following patent database. Patent information such as a patent analysis result, a patent map, and a patent landscape can be freely used for patent searches, analysis, and work on intellectual property strategies, including IP landscaping.
ウエハ等の容器,移送,固着,位置決め等技術[5F131]
Same industry / competition company information (JP)
The patent information of the higher applicant in the technical theme ウエハ等の容器,移送,固着,位置決め等技術 is shown below. By comparing the number of patents of each company, you can check the research and development status of each company's past and present technical themes and the position of each company in the technical theme.
Trends in filing of joint patent applications in the last 3 years (2022 to 2024).
Comparing the number of applications of each company, 株式会社ディスコ has the highest number of joint applications in the last in the last 3 years (2022 to 2024) with 228 cases, followed by 東京エレクトロン株式会社 with 210 cases.
| Name | Cases |
|---|---|
| 株式会社ディスコ | 228 cases |
| 東京エレクトロン株式会社 | 210 cases |
| 株式会社SCREENホールディングス | 87 cases |
| アプライドマテリアルズインコーポレイテッド | 66 cases |
| キヤノン株式会社 | 63 cases |
| リンテック株式会社 | 55 cases |
| 三菱電機株式会社 | 14 cases |
| 株式会社東芝 | 5 cases |
Trends in filing of joint patent applications for the target period (2014 to 2024).
Comparing the number of applications of each company, 東京エレクトロン株式会社 has the highest number of joint applications in the last for the target period (2014 to 2024) with 1,493 cases, followed by 株式会社ディスコ with 1,423 cases.
| Name | Cases |
|---|---|
| 東京エレクトロン株式会社 | 1,493 cases |
| 株式会社ディスコ | 1,423 cases |
| アプライドマテリアルズインコーポレイテッド | 690 cases |
| 株式会社SCREENホールディングス | 483 cases |
| 株式会社ニコン | 433 cases |
| リンテック株式会社 | 424 cases |
| キヤノン株式会社 | 412 cases |
| 三菱電機株式会社 | 94 cases |
| 株式会社東芝 | 31 cases |
| 株式会社日立国際電気 | 30 cases |
| 株式会社日立製作所 | 5 cases |
Same industry / competition company, Change in the Number of JP Patents
Below is a patent map showing changes in the number of applications for JP patents of 11 companies in the same industry over the past 20 years.
Top company information (JP)
The patent information of the higher applicant in the technical theme ウエハ等の容器,移送,固着,位置決め等技術 is shown below. By comparing the number of patents of each company, you can check the research and development status of each company's past and present technical themes and the position of each company in the technical theme.
Trends in filing of joint patent applications in the last 3 years (2022 to 2024).
among the top coapplicants, 株式会社ディスコ has the highest number of joint applications in the last in the last 3 years (2022 to 2024) with 228 cases, followed by 東京エレクトロン株式会社 with 210 cases.
| Name | Cases |
|---|---|
| 株式会社ディスコ | 228 cases |
| 東京エレクトロン株式会社 | 210 cases |
| 株式会社SCREENホールディングス | 87 cases |
| アプライドマテリアルズインコーポレイテッド | 66 cases |
| キヤノン株式会社 | 63 cases |
Trends in filing of joint patent applications for the target period (2014 to 2024).
among the top coapplicants, 東京エレクトロン株式会社 has the highest number of joint applications in the last for the target period (2014 to 2024) with 1,493 cases, followed by 株式会社ディスコ with 1,423 cases.
| Name | Cases |
|---|---|
| 東京エレクトロン株式会社 | 1,493 cases |
| 株式会社ディスコ | 1,423 cases |
| アプライドマテリアルズインコーポレイテッド | 690 cases |
| 株式会社SCREENホールディングス | 483 cases |
| 株式会社ニコン | 433 cases |
| キヤノン株式会社 | 412 cases |
| 株式会社日立製作所 | 5 cases |
Top company, Change in the Number of JP Patents
Below is a ranking of the number of JP patent applications by ウエハ等の容器,移送,固着,位置決め等技術’s top 7 coapplicants over the last 20 years.
Below is a patent map showing the changes in the numbers of JP patent filings by ウエハ等の容器,移送,固着,位置決め等技術’s top 7 coapplicants over the last 20 years.
Top company Details (JP)
Trends in filing of joint patent applications with 東京エレクトロン株式会社
ウエハ等の容器,移送,固着,位置決め等技術 filed 1,493 joint applications with 東京エレクトロン株式会社 for the analysis period (2014 to 2024).
The mean of the number of filings over the last 5 years (2018 to 2023, 1,039 cases in total) is 173, and the median is 191. The coefficient of variation (standard deviation/mean) is 0.3, and there have been big fluctuations in the number of filings from year to year.
The highest number of filings in 2020 with 231 cases, and their lowest number in 2015 with 101 cases.
| Index | Value |
|---|---|
| Average | 173 patents |
| Std Dev | 56.4 |
| COV | 0.3 |
| Year | Cases | YOY |
|---|---|---|
| 2022 year | 142 cases | -24.06 % |
| 2021 year | 187 cases | -19.05 % |
| 2020 year | 231 cases | +5.00 % |
Trends in filing of joint patent applications with 株式会社ニコン
ウエハ等の容器,移送,固着,位置決め等技術 filed 433 joint applications with 株式会社ニコン for the analysis period (2014 to 2024).
The mean of the number of filings over the last 5 years (2018 to 2023, 86 cases in total) is 14.3, and the median is 5.5. The coefficient of variation (standard deviation/mean) is 1.5, and there have been very big fluctuations in the number of filings from year to year.
The number of filings has been decreasing for the last 3 years (2020 to 2023). The highest number of filings in 2016 with 108 cases, and their lowest number in 2022 with 0 cases.
| Index | Value |
|---|---|
| Average | 14.3 patents |
| Std Dev | 21.1 |
| COV | 1.5 |
| Year | Cases | YOY |
|---|---|---|
| 2021 year | 3 cases | -62.5 % |
| 2020 year | 8 cases | -46.7 % |
| 2019 year | 15 cases | -75.0 % |
Trends in filing of joint patent applications with 株式会社ディスコ
ウエハ等の容器,移送,固着,位置決め等技術 filed 1,423 joint applications with 株式会社ディスコ for the analysis period (2014 to 2024).
The mean of the number of filings over the last 5 years (2018 to 2023, 1,014 cases in total) is 169, and the median is 161. The coefficient of variation (standard deviation/mean) is 0.4, and there have been big fluctuations in the number of filings from year to year.
The number of filings has been decreasing for the last 3 years (2020 to 2023). The highest number of filings in 2019 with 273 cases, and their lowest number in 2014 with 78 cases.
| Index | Value |
|---|---|
| Average | 169 patents |
| Std Dev | 60.7 |
| COV | 0.4 |
| Year | Cases | YOY |
|---|---|---|
| 2022 year | 155 cases | +5.44 % |
| 2021 year | 147 cases | -11.98 % |
| 2020 year | 167 cases | -38.8 % |
Trends in filing of joint patent applications with 株式会社SCREENホールディングス
ウエハ等の容器,移送,固着,位置決め等技術 filed 483 joint applications with 株式会社SCREENホールディングス for the analysis period (2014 to 2024).
The mean of the number of filings over the last 5 years (2018 to 2023, 303 cases in total) is 50.5, and the median is 50.0. The coefficient of variation (standard deviation/mean) is 0.25, and there have been small fluctuations in the number of filings from year to year.
The number of filings has been decreasing for the last 3 years (2020 to 2023). The highest number of filings in 2019 with 75 cases, and their lowest number in 2016 with 38 cases.
| Index | Value |
|---|---|
| Average | 50.5 patents |
| Std Dev | 12.8 |
| COV | 0.25 |
| Year | Cases | YOY |
|---|---|---|
| 2022 year | 53 cases | +29.27 % |
| 2021 year | 41 cases | -22.64 % |
| 2020 year | 53 cases | -29.33 % |
Trends in filing of joint patent applications with キヤノン株式会社
ウエハ等の容器,移送,固着,位置決め等技術 filed 412 joint applications with キヤノン株式会社 for the analysis period (2014 to 2024).
The mean of the number of filings over the last 5 years (2018 to 2023, 228 cases in total) is 38.0, and the median is 40.5. The coefficient of variation (standard deviation/mean) is 0.26, and there have been small fluctuations in the number of filings from year to year.
The number of filings has been increasing for the last 3 years (2020 to 2023). The highest number of filings in 2016 with 54 cases, and their lowest number in 2018 with 34 cases.
| Index | Value |
|---|---|
| Average | 38.0 patents |
| Std Dev | 9.9 |
| COV | 0.26 |
| Year | Cases | YOY |
|---|---|---|
| 2022 year | 43 cases | +2.38 % |
| 2021 year | 42 cases | +7.69 % |
| 2020 year | 39 cases | -23.53 % |
Information on important patents (JP)
The following shows JP patents held by ウエハ等の容器,移送,固着,位置決め等技術 that have had an invalidation trial against them demanded or an opposition filed against them by a third party, and ウエハ等の容器,移送,固着,位置決め等技術’s JP patents/patent applications of high importance cited by Examiners in patent examination processes.
By noting the most important patents, you can obtain knowledge of the competitive business environment in which ウエハ等の容器,移送,固着,位置決め等技術 is placed (e.g., whether it is a fiercely competitive environment or an oligopolistic market and the like). In general, it can be understood that a company with a large number of demands for invalidation trials is developing their business in a business environment where IP disputes are common.
If you want to search for more detailed information, you can use Patent Integration to retrieve and download by company cited patents/patent applications or patents undergoing invalidation trials. You can quickly extract important patents from a patent set that includes multiple competitors by cross-referencing with other keywords and patent classifications. Please consider using it for searches for important patents/patent applications.
Glossary
- Cited
- Indicates that the patent/patent application has been cited (by Examiners) in notices of reasons for rejection in the examination process of other (Japanese, U.S., or European) patent applications. The higher the number of citations, the more important the patent/patent application is considered to be.
- Request for invalidation trial
- Indicates that a third party has requested a procedure to invalidate the patent. It is likely to affect the business of third parties and is considered to be of high importance.
- Opposition
- Indicates that a third party has filed a petition with the Patent Office to hear the validity of the patent again. Like the trial for invalidation, it is considered to be of high importance.
- Information provision
- Indicates that a third party has provided the Patent Office with useful information for examination for the patent filed. It is usually considered to be of high importance because it is done to prevent the patent from being granted.
- Browsing request
- Indicates that a third party has requested the Patent Office to view the patent bag (a set of documents exchanged between the Patent Office and the applicant). The bag is often checked prior to trial for invalidation, opposition, and provision of information, and is considered to be a highly important patent.
Oppositioned cases
List of latest Oppositioned patents
In the last 3 years (2021-12-01 ~ 2024-11-30), there were 30 patents Opposition from third parties. The average number of Opposition is 1.0 times. The most recently Opposition patent is 特許7458354 "保持装置" (Opposition day 2024-09-25) , next is 特許7450427 "基板支持器及びプラズマ処理装置" (Opposition day 2024-09-13) .
| - | No. | Title | Opposition days |
|---|---|---|---|
| 1 | 特許7458354 | 保持装置 | 2024-09-25 |
| 2 | 特許7450427 | 基板支持器及びプラズマ処理装置 | 2024-09-13 |
| 3 | 特許7441728 | 搬送ロボットおよび搬送システム | 2024-08-26 |
| 4 | 特許7411431 | 静電チャック、基板固定装置 | 2024-07-10 |
| 5 | 特許7413088 | 保持装置および半導体製造装置 | 2024-06-25 |
| 6 | 特許7394556 | 載置台及び基板処理装置 | 2024-06-07 |
| 7 | 特許7393571 | 保持装置 | 2024-06-05 |
| 8 | 特許7394178 | 保持装置 | 2024-06-03 |
| 9 | 特許7347709 | 静電チャック | 2024-03-19 |
| 10 | 特許7329917 | 基板固定装置 | 2024-02-19 |
Protested cases
List of latest Protested patents
In the last 3 years (2021-12-01 ~ 2024-11-30), there were 76 patents Protest from third parties. The average number of Protest is 1.4 times. The most recently Protest patent is 特開2022-090466 "静電チャック装置" (Protest day 2024-11-21) , next is 特開2024-046684 "保持装置" (Protest day 2024-10-28) .
| - | No. | Title | Protest days |
|---|---|---|---|
| 1 | 特開2022-090466 | 静電チャック装置 | 2024-11-21 |
| 2 | 特開2024-046684 | 保持装置 | 2024-10-28 |
| 3 | 特開2022-024328 | 保持装置 | 2024-10-23 |
| 4 | 特開2023-149720 | 保持装置 | 2024-10-23 |
| 5 | 特開2023-149660 | ウエハ載置台 | 2024-10-16 |
| 6 | 特開2023-105892 | 基板固定装置 | 2024-10-04 |
| 7 | 特開2024-046683 | 保持装置 | 2024-10-02 |
| 8 | 特開2023-076246 | 基板保持部材及び基板保持部材の製造方法 | 2024-10-02 |
| 9 | 特開2023-041281 | 半導体製造装置 | 2024-09-20 |
| 10 | 特開2023-013587 | 保持装置 | 2024-09-13 |
| 11 | 特開2023-157415 | 保持部材および静電チャック | 2024-09-11 |
| 12 | 特開2024-046686 | 保持装置 | 2024-09-04 |
| 13 | 特開2023-002461 | 基板処理装置及び静電チャック | 2024-08-21 |
| 14 | 特開2024-040302 | 試料保持具 | 2024-08-06 |
| 15 | 特開2023-049407 | ピックアップ装置及び実装装置 | 2024-07-19 |
| 16 | 特開2023-004738 | 基板載置台、基板処理装置及び基板載置台の製造方法 | 2024-07-11 |
| 17 | 特開2022-120810 | 基板支持体及び基板処理装置 | 2024-07-05 |
| 18 | 特開2023-040595 | セラミックスヒータ | 2024-07-03 |
| 19 | 特開2023-040596 | セラミックスヒータ | 2024-07-03 |
| 20 | 特開2023-031603 | 基板固定装置 | 2024-06-18 |
Top Patents/Patent Applications with the Highest Number of Protested
Of the patent applications filed in the last 10 years (2014-12-01 to 2024-11-30), 101 patents/patent applications were protest more than once in the examination process of other patent applications. The mean of the number of protest is 1.4. The most protest patent is 特許7394178 "保持装置" (6 times) , and the next most protest patent is 特許7181898 "窒化アルミニウム焼結体およびこれを含む半導体製造装置用部材" (5 times) .
| - | No. | Title | |
|---|---|---|---|
| 1 | 特許7394178 | 保持装置 | 6 times |
| 2 | 特許7181898 | 窒化アルミニウム焼結体およびこれを含む半導体製造装置用部材 | 5 times |
| 3 | 特許6909448 | 静電チャック | 3 times |
| 4 | 特許6909447 | 静電チャック | 3 times |
| 5 | 特開2022-024328 | 保持装置 | 3 times |
Inspectioned cases
List of latest Inspectioned patents
In the last 3 years (2021-12-01 ~ 2024-11-30), there were 125 patents Inspection from third parties. The average number of Inspection is 1.5 times. The most recently Inspection patent is 特開2022-090466 "静電チャック装置" (Inspection day 2024-11-26) , next is 特開2024-046684 "保持装置" (Inspection day 2024-11-20) .
| - | No. | Title | Inspection days |
|---|---|---|---|
| 1 | 特開2022-090466 | 静電チャック装置 | 2024-11-26 |
| 2 | 特開2024-046684 | 保持装置 | 2024-11-20 |
| 3 | 特開2022-024328 | 保持装置 | 2024-10-29 |
| 4 | 特開2023-149720 | 保持装置 | 2024-10-29 |
| 5 | 特開2023-076246 | 基板保持部材及び基板保持部材の製造方法 | 2024-10-25 |
| 6 | 特開2024-046683 | 保持装置 | 2024-10-23 |
| 7 | 特開2023-149660 | ウエハ載置台 | 2024-10-22 |
| 8 | 特開2023-105892 | 基板固定装置 | 2024-10-09 |
| 9 | 特開2024-046686 | 保持装置 | 2024-10-02 |
| 10 | 特開2023-157415 | 保持部材および静電チャック | 2024-09-26 |
| 11 | 特開2023-013587 | 保持装置 | 2024-09-26 |
| 12 | 特開2023-002461 | 基板処理装置及び静電チャック | 2024-09-02 |
| 13 | 特開2024-040302 | 試料保持具 | 2024-08-23 |
| 14 | 特開2023-049407 | ピックアップ装置及び実装装置 | 2024-08-22 |
| 15 | 特開2023-004738 | 基板載置台、基板処理装置及び基板載置台の製造方法 | 2024-07-16 |
| 16 | 特開2023-031603 | 基板固定装置 | 2024-07-16 |
| 17 | 特開2023-040595 | セラミックスヒータ | 2024-07-12 |
| 18 | 特開2023-040596 | セラミックスヒータ | 2024-07-12 |
| 19 | 特開2022-120810 | 基板支持体及び基板処理装置 | 2024-07-11 |
| 20 | 特許7515583 | 通気性プラグ、基板支持アセンブリおよびシャワープレート | 2024-06-26 |
Top Patents/Patent Applications with the Highest Number of Inspectioned
Of the patent applications filed in the last 10 years (2014-12-01 to 2024-11-30), 197 patents/patent applications were inspection more than once in the examination process of other patent applications. The mean of the number of inspection is 1.3. The most inspection patent is 特許6909448 "静電チャック" (8 times) , and the next most inspection patent is 特許7181898 "窒化アルミニウム焼結体およびこれを含む半導体製造装置用部材" (8 times) .
| - | No. | Title | |
|---|---|---|---|
| 1 | 特許6909448 | 静電チャック | 8 times |
| 2 | 特許7181898 | 窒化アルミニウム焼結体およびこれを含む半導体製造装置用部材 | 8 times |
| 3 | 特許6909447 | 静電チャック | 8 times |
| 4 | 特開2020-013983 | 高温静電チャック | 4 times |
| 5 | 特許7394178 | 保持装置 | 4 times |
Cited cases
Top Patents/Patent Applications with the Highest Number of Cited
Of the patent applications filed in the last 10 years (2014-12-01 to 2024-11-30), 3,162 patents/patent applications were cited more than once in the examination process of other patent applications. The mean of the number of cited is 2.6. The most cited patent is 特許7171139 "被加工物の加工方法" (50 times) , and the next most cited patent is 特許6635888 "プラズマ処理システム" (34 times) .
| - | No. | Title | |
|---|---|---|---|
| 1 | 特許7171139 | 被加工物の加工方法 | 50 times |
| 2 | 特許6635888 | プラズマ処理システム | 34 times |
| 3 | 特許6912179 | 正面開口式リングポッド | 33 times |
| 4 | 特許6783521 | 半導体ウエハ処理中におけるエッジ処理制御のための可動式エッジ連結リング | 27 times |
| 5 | 特許6688172 | 基板処理システムおよび方法 | 26 times |
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